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Light carrying chip patterns through a lithography system can heat the system’s optics and deform the patterns. With wavefront optimization – computational lithography tools to correct chip patterns just before they reach the wafer – we ensure patterns appear exactly as intended.

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ASML

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To print perfect chips, you need the perfect illumination. With our computational lithography tools, chipmakers can optimize the light from their lithography system’s source to produce the sharpest features every time – a must for printing tiny features on advanced microchips.
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